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High Purity Ta Sputtering Target
Material: Tantalum (Ta)
Purity: 4N, 4N5
Microstructure: Uniform and equiaxial grains
Shanghai Metal Corporation is a leading high purity Ta sputtering target manufacturer and supplier.
High purity tantalum sputtering target is refractory metal PVD source material, manufactured by vacuum electron-beam melting, thermo-mechanical deformation, controlled recrystallization annealing and precision clean‑room machining. It delivers uniform sputtering rate, stable grain & crystal texture, ultra‑low impurity level. Mainly used for copper diffusion‑barrier layer in semiconductor dual-damascene process, optical coating, flat‑panel display and advanced thin‑film deposition.
If you have any other questions about high purity Ta sputtering target, please feel free to contact us, we'll reply you within 24 hours.
Physical & Micro‑Structure Properties:
1. Hardness: 120‑180 HV
2. Tensile Strength: ≥200 MPa
3. Elongation ≥15%
4. Backing: OFHC Cu, Indium / Diffusion bonding, void rate <1%
5. Inspection: 100% UT, C‑scan bonding test, GDMS purity report
Production Process：
Packaging:
Inner: Class‑1000 clean‑room vacuum aluminium foil sealing
Outer: Anti‑shock foam + plywood case for export shipment
Shipping:
Ex‑Works, FOB main Chinese seaport, CFR, CIF. Buyer selects ocean freight, land trucking or air freight.
Shipping costs are based on each order. Exact packing dimensions and weight will be provided on the finished‑packing list for each order.
Lead Time:
Standard orders: 15‑25 working days
Customized oders: 25‑35 working‑days
Q1: What purity grades are available for tantalum sputtering targets?
A: We supply 3N5 (99.95%), 4N (99.99%), 4N5 (99.995%) and 5N (99.999%).
Q2: What shapes can you provide for Ta sputtering targets?
A: Planar disc, rectangular, annular and rotary cylindrical targets.
Q3: What information should I provide for accurate quotation?
A: Please advise: purity grade, shape & dimension drawing, monolithic or indium‑bonded, required test items, quantity and end‑use application.
Q4: What's your payment terms?
A: T/T AD or Irrevocable L/C.
Q5: What's your delivery time?
A: Usually we will arrange the shipment within 15 to 30 days.
Q6: How about the validity of the products?
A: According to the products you ordered.
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